PropertyValue
teach:academicTerm
  • III-V (spring)
aiiso:code
  • MT-0.6077
teach:courseDescription
  • Working in the cleanroom under supervision and guidance of an assistant. Main processes in silicon microfabrication: lithography, metal and oxide deposition, plasma and wet etching, wafer cleaning, measurements to monitor fabrication processes. Electrical and optoelectronic measurements of the fabricated microdevices. (en)
teach:courseTitle
  • Microfabrication Laboratory Course (en)
teach:ects
  • 5
teach:grading
foaf:homepage
dc:language
  • en
rdf:type